| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a substrate lifter which can prevent the flow of a treating solution to both surfaces of the substrate held by the ends of substrate holding members in the longitudinal direction from becoming nonuniform at the time of treating the substrates. SOLUTION: A substrate lifter 4 is constituted by integrally providing a support member 2 for elevating/lowering successively from one end sides of three substrate holding members in the longitudinal direction, and integrally connecting a connecting member 3 to the other end sides. Each substrate holding member 1 has substrate holding grooves 6 formed at prescribed pitches in the longitudinal direction for holding substrates 5 put in the grooves 6 in upright attitudes. On the support member 2 side and connecting member 3 side of the substrate holding members 1, first and third turbulent flow preventing plates 8a and 10 having the same thickness and shape as the substrates 5 have are provided at positions apart from the grooves 6 at the ends of the members 1 by the same interval as the arranging intervals of the grooves 6, so as to make a treating solution flow uniformly on both surfaces of the substrates 5 held at both ends of the members 1 at the time of treating the substrates 5.</p> |
