| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a substrate holding device the vacuum suction member of which can be exchanged easily with another one and which can surely prevent a falling member to be inspected. SOLUTION: Four suction pad groups 6 each of which is composed of suction pads 6a and 6b are arranged on a robot arm 5 in such a way that the groups 6 are separated from each other by prescribed distances and a glass substrate 3 is held by vacuum suction by means of one suction pads 6a of the groups 6. When one of the suction pads 6a causes leakage while the pads 6 hold the substrate 3 by vacuum suction, the pad 6 causing the leakage is switched to another suction pad 6b of the same group 6 by switching a solenoid valve 8a (8b, 8c, or 8d).</p> |
