| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a vacuum vessel whose cavity is regulated in pressure so as to be of prescribed degree of vacuum and which is equipped with a functional device that is sealed up in its cavity and uniform in operating characteristics. SOLUTION: A functional device 2 mounted on a support board 1 is sealed up in the recess 4 of a lid board 3 under vacuum, and after a closed vessel 10a composed of the support board 1 and the lid board 3 is housed in a vacuum chamber 6, and gas of large diffusion coefficient is introduced into the vacuum chamber 6 to penetrate into a cavity 4a, whereby the pressure of the cavity 4a is controlled.
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