| 摘要 |
PROBLEM TO BE SOLVED: To provide a pinhole with a smaller diameter of a hole (e.g. 1μm or less) with a higher durability. SOLUTION: A transparent substrate 1 is provided. A metal light shielding film 2 is provided on the substrate 1 and has a microscopic opening 4 formed by removing a part thereof. Moreover, a multilayer film reflection layer 3 is provided on an area except for the microscopic opening 4 on the metal light shielding film 2. The multilayer film reflection layer 3 is preferably made up of a layer made of at least two kinds or more of materials selected from among silicon oxide, alumina, cerium oxide, cadmium oxide, hafnium oxide, magnesium oxide, neodymium oxide, lead oxide, antimony oxide, scandium oxide, tantalum oxide, titanium oxide, yttrium oxide, zinc oxide, zirconium oxide, gadolinium oxide, aluminum fluoride, calcium fluoride, cerium oxide, lanthanum fluoride, lithium fluoride, magnesium fluoride, neodymium fluoride, lead fluoride, molybdenum, silicon and berylium.
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