| 摘要 |
PROBLEM TO BE SOLVED: To easily observe and measure the front side and the back side of the surface of a sample by providing a reflection mirror arranged at a distance from the sample on an opposite side to an objective lens arranged side in the case of viewing from the sample and relatively moving the objective lens and the sample so that the observed image of all the surfaces of the sample may be obtained. SOLUTION: This microscope is provided with the reflection mirror arranged at a distance from the sample on the opposite side to the objective lens arranged side in the case of viewing from the sample, and the objective lens and the sample are relatively moved to obtain the observed image of all the surfaces of the sample. In the microscope, the reflection mirror 20 is placed on a sample base 1 and the sample 2 is arranged on an objective lens 11 side at distance (h) from the mirror 20. An arithmetic processing device 23 has a function to issue a command for moving the lens 11 in a direction Z to an objective lens position control part 24, obtain the height position of the lens 11 at a focusing position decided by a focusing decision part 22, and obtain the three-dimensional shape of the sample 2 from the height position of the lens 11 in respective pixels in image data.
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