| 摘要 |
PROBLEM TO BE SOLVED: To pick up a precise image, which is less affected by vibration or the like in operation by reducing the number of tables and reducing an overhang amount, and also reduce weight and the number of part items for the whole of a table mechanism. SOLUTION: A Z-axial table 21 is mounted on a Y-axial table 50 via a fixing frame 48. The first and second S-axial tables 23, 24 movable freely in an X- direction are mounted on a front face of the Z-axial table 21. Line sensor cameras 4A, 4B are mounted respectively on front faces of the first and second tables 23, 24. The first and second tables 23, 24 are connected by a drive device 26 for an S-axial to approach or separate the second table 24 with respect to the first table 23 thereby. The Z-axial table 21 is connected to the first table 23 by a drive device 31 for an x-axis to move thereby the first and second tables 23, 24 to an X-axial direction at the same time while keeping a fixed space.
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