| 摘要 |
PROBLEM TO BE SOLVED: To easily and stably perform surface matching of optical parts. SOLUTION: When a second optical parts W2 is clamped by a clamping device 13 of an upper end of a support body 9 provided on a disk 11 decantably supported by a liquid bearing 7 while turning its connection surface upward, and the connection surface is pressed to a first optical parts W1, and the surface matching is performed, since the disk 11 is decantable freely, the disk 11 and the support body 9 are moved so that the connection surface of the second optical parts W2 is in contact closely with the connection surface of the first optical parts W1, and the surface matching is performed easily and surely. At this time, since the balance of the disk 11 is held by angular adjusting mechanisms 25A, 25B, 25C provided on the positions nearly trisecting the disk 11, the stable surface matching is performed.
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