发明名称 SCANNING ELECTRON MICROSCOPE
摘要 PROBLEM TO BE SOLVED: To provide functions for recording and displaying areas observed by providing a first display for displaying an observed image and a second display for displaying an area which is being presently observed and an area already observed. SOLUTION: An observed area display means 30 computes an observation visual field from coordinate data and magnification data of a given stage 11 and displays it on a second CRT display. The coordinate point of the present position of the stage 11 is displayed thereon, and also the area of the visual field is displayed as an image. The observed area display means 30 records the data and image-displays the areas already observed after the time of last reset. In this display, as for records of observation with a smaller scaling factor, the visual field is larger and a larger area is displayed correspondingly, and as for records with a larger scaling factor, a smaller area is displayed. Also, a second CRT display 31 has a variable scaling-factor display, so that larger areas can be viewed with a smaller scaling factor or that local areas can be checked with a larger magnification.
申请公布号 JP2000100368(A) 申请公布日期 2000.04.07
申请号 JP19980269747 申请日期 1998.09.24
申请人 NEC KANSAI LTD 发明人 ISONO KAORU
分类号 H01J37/20;H01J37/22;(IPC1-7):H01J37/22 主分类号 H01J37/20
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