| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe array for fine machining, enabling easy manufacture and uniform machining. SOLUTION: A probe array 1 having a plurality of probes has an elastic material at least for a part of a probe 102 and probe base 100. As a result, the probes are constituted so as to be movable along a direction approximately vertical to the machined surface of the probes, depending on the stresses applied to the fine end of the probe 102. According to this construction, the dispersion of the fine end height of each probe or irregularities on machined suface, even if there is any, are absorbed by the elastic material and a uniform machining area is obtained.
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