| 摘要 |
PROBLEM TO BE SOLVED: To observe even a large-sized sample without dividing it, and to obtain a more accurate surface structure by scanning the fixed sample surface with a probe and observing the large sample surface at an optional position by moving an observation unit. SOLUTION: This scanning probe microscope has a means for moving an observation unit 3 to an optional position on the sample surface, and the large sample surface can be observed at an optional position by making a probe scan parallel to the sample surface. The moving means of the observation unit 3 has a vibration removal or damping means 4 and comprises two moving means. Namely, a second moving means 2 supplements the positioning accuracy of a first moving means 1 having a large moving range, and its positioning accuracy is higher than the positioning accuracy of the first moving means 1, and its moving range is smaller than the scanning range of the probe. Hereby, the high-accuracy positioning and the wide moving range are compatible, and the probe can be moved accurately to an optional minute region on the large sample surface, such as a master disc of a compact disc, to thereby execute measurement.
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