| 摘要 |
PROBLEM TO BE SOLVED: To enable a positioning with high acceleration/deceleration and high accuracy by providing an XY axes head positioning device light in weight and high in rigidity which can obtain high feedback controllability. SOLUTION: This device is provided with a head 30 installed on an XY plane guiding device 41 movable in the XY directions, X-axis table 1 installed on a straight move guiding device 6 straight-linearly movable in the X-axis direction and provided with a flat coil 34 so as to drive the head 30 in the X-axis direction, Y-axis table 2 installed on the straight move guiding device 6 enabled in straight-linearly movable in the Y-axis direction and provided with the flat coil 34 so as to drive the head 30 in the Y-axis direction, electromagnetic driving device with the flat coils 34 of the X-axis and Y-axis tables 1 and 2 as movable elements and link guiding device 40 for sliding the head 30 along with the end faces of the X-axis table 1 and Y-axis table 2, and the center of gravity of the said head 30, X-axis table 1, Y-axis table 2 and link guiding device 40 are arranged on almost the same plane.
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