| 摘要 |
PURPOSE: A method for estimating a stress migration of a semiconductor device is provided to estimate a stress migration within a short time. CONSTITUTION: A method for estimating a stress migration of a semiconductor device heats (10) the semiconductor device with the alloying temperature for a predetermined time, cools(20) the heated semiconductor device until a predetermined temperature lower than the alloying temperature, and ages(30) the cooled semiconductor device for a predetermined time. Thereby, the time needed to estimate a stress migration is reduced, a feedback of the estimation result becomes easy.
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