| 摘要 |
<p>In order to prevent a slip, as might otherwise occur at a heat treatment of a wafer, in a conventional wafer boat for a vertical furnace in which the wafer is supported at its circumferential edge by a facial contact of an arcuate wafer supporting member, in the face of the wafer supporting member on the wafer-supporting side groovelike notches are made at positions where notches make angles of 45 degrees at the center of the arc with respect to the wafer inserting direction in such a way that the supporting member is out of contact with the wafer.</p> |
