WAFER GUIDE OF SEMICONDUCTOR BAKING APPARATUS

摘要

PURPOSE: A wafer guide used for a baking system is provided to prevent a transfer error of the wafer by using at least two rackers. CONSTITUTION: A wafer guide(10) comprises a disc-shaped body(11) and a plurality of rackers (12). The disc shaped body(11) is located on an upper surface of a heating plate(20) and has a through hole(14). A sloped face(13) is formed in the through hole(14) so as to guide a wafer(1). The rackers(12) is formed at the lower surface of the body(11) and at edge portions of the heating plate(20), so that the body(11) is fixed on the heating plate(20).