| 摘要 |
PURPOSE: A loader arm of a semiconductor auto loader prevents a collis ion between a cassette and a wafer holder, enhances a driving ratio and productivity of the device, prevents a wafer damage by a rounding process and a polishing process of the body, and enhances a durability of the component. CONSTITUTION: A loader arm(10) of a semiconductor auto loader attaches a wafer(1) mounted in an elevating cassette(2), is conveyed by a conveyor, and is transmitted to a wafer holder of a specific position. The loader arm includes a plate type body, and a reinforcement plate. A rear end of the plate type body is fixed to the conveyor by a screw, a front end thereof is contacted with a border of a projected wafer of the cassette, and a vacuum groove connected to a vacuum line is formed on a contact surface contacted with a border of the wafer. The reinforcement plate covers the rear end of the body so as to reinforce a strength of the rear end of the body, and is assembled with the body by a screw. Thereby, the loader arm of a semiconductor auto loader prevents a collis ion between a cassette and a wafer holder, enhances a driving ratio and productivity of the device, prevents a wafer damage by a rounding process and a polishing process of the body, and enhances a durability of the component.
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