| 发明名称 |
Borgring voor gebruik in een chemisch-mechanische polijstmachine en fabricageproces met gebruikmaking hiervan. |
| 摘要 |
The polishing machine retaining sleeve (50) has a set of suspension passages (52) in its lower part and a circular track (54). By circulating the suspension through the suspension passages and the circular track a semiconductor section is leveled with excellent uniformity in the polishing machine. |
| 申请公布号 |
NL1010252(A1) |
申请公布日期 |
2000.04.06 |
| 申请号 |
NL19981010252 |
申请日期 |
1998.10.05 |
| 申请人 |
UNITED MICROELECTRONICS CORP. |
发明人 |
JUEN-KUEN LIN;CHIEN-HSIN LAI;PENG-YIH PENG;KUN-LIN WU;DANIEL CHIU;CHIH-CHIANG YANG;JUAN-YUAN WU;HAO-KUANG CHIU |
| 分类号 |
B24B37/04;B24B57/02 |
主分类号 |
B24B37/04 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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