| 发明名称 |
METHOD FOR MANUFACTURING CARBON NANOTUBES AS FUNCTIONAL ELEMENTS OF MEMS DEVICES |
| 摘要 |
<p>A system and method for manufacturing carbon nanotubes as functional elements of MEMS devices. The method of the present invention comprises the steps of preparing a MEMS substrate for synthesis of a carbon nanotube. A nanosize hole or catalyst retaining structure is fabricated on the MEMS substrate in which a nanotube catalyst is deposited. A nanotube is then synthesized within the nanosize hole.</p> |
| 申请公布号 |
WO0019494(A1) |
申请公布日期 |
2000.04.06 |
| 申请号 |
WO1999US22334 |
申请日期 |
1999.09.28 |
| 申请人 |
XIDEX CORPORATION |
发明人 |
MANCEVSKI, VLADIMIR |
| 分类号 |
B81C3/00;B81C5/00;C01B31/02;C23C14/06;C23C16/26;G01Q60/24;G01Q70/12;G01Q70/16;G11C23/00;H01J9/02;(IPC1-7):H01L21/00;H01J19/24;H01J1/14 |
主分类号 |
B81C3/00 |
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