| 摘要 |
PROBLEM TO BE SOLVED: To provide a highly reliable angular velocity sensor capable of returning a vibrator to a normal position even in the case of receiving a large acceleration such as an impact or the like. SOLUTION: Driving pectinated electrodes 11a, 11b, 4a, 5a for driving a vibrator 9 in a length direction, detecting pectinated electrodes 12a, 12b, 6a, 7a for detecting a vibration of the vibrator based on a Corioris force, and a movable stopper for displacing in the same direction in response to an impact to be applied to the vibrator 9 are provided near the vibrator 9 to prevent an excessive vibration of the vibrator 9. |
