| 摘要 |
PURPOSE: A wafer conveying device(100) fixing a wafer(12) indicates a division of a scale thereon, sucks accurate position of the wafer. CONSTITUTION: A wafer conveying device(100) for fixing a wafer(12) thereon forms the divisions of a scale at a predetermined interval on a wafer contact part. The wafer conveying device sucks the wafer by using a vacuum. Thereby, a reference about a wafer suction position is provided, a problem in a fabrication process is removed, and a wafer damage is prevented.
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