| 摘要 |
PURPOSE: A laminating typed vacuum pump is provided to contain plural pump blocks having a multi-stepped nozzle and to install the pump blocks to a frame body for increasing a vacuum rate and a vacuum amount for improving a vacuum efficiency. CONSTITUTION: A laminating typed vacuum pump(1) is formed by: plural pump blocks(200) being laminated; a frame body(100) containing an injecting aperture(111) for injecting air and a discharging aperture(112) for discharging the injected air while finishing the both side surfaces of the pump block; plural independent spaces being installed in the pump block such as an injecting chamber(210), a first, a second, and a third vacuum chambers(221, 222, 223), and a discharging chamber(230); and a first, a second, and a third nozzles(241, 242, 243) being installed on the same shaft for penetrating the walls separating the injecting chamber, the first, the second, and the third vacuum chambers, and the discharging chamber. Herein, the nozzle contains an inner circumference having an inclined surface being enlarged toward the direction of the air to progress.
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