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发明名称
TRANSPORT APPARATUS FOR THIN, BOARD-SHAPED SUBSTRATES
摘要
申请公布号
EP0990379(A1)
申请公布日期
2000.04.05
申请号
EP19980903009
申请日期
1998.01.15
申请人
CIBA SPECIALTY CHEMICALS HOLDING INC.
发明人
RUEEGGE, ANTON;KRAFT, GERHARD;RECKERT, TORSTEN;KUSTER, KASPAR
分类号
H05K13/00;(IPC1-7):H05K13/00
主分类号
H05K13/00
代理机构
代理人
主权项
地址
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