| 发明名称 |
POSITION SENSOR |
| 摘要 |
<p>A position detector of high resolving power, the cost of which is low, is provided. Light emitted from a light source 1 is reflected by a moving section 70 (71) and made to pass through a first slit 3 (31, 32) and also made to pass through a second slit 20 (20-1, 20-2) in a fixed section 13 (130, 131). A position of the moving section 70 (71) is detected by Moire stripes obtained at this time. It is possible to shorten the slit length, and the cost of the device can be reduced. <IMAGE></p> |
| 申请公布号 |
EP0990870(A1) |
申请公布日期 |
2000.04.05 |
| 申请号 |
EP19980914058 |
申请日期 |
1998.04.17 |
| 申请人 |
MITSUBISHI DENKI KABUSHIKI KAISHA |
发明人 |
SATO, YOSHIMITSU;MIZUTANI, TAKAO;SAKUMA, HIROKAZU;OKAMURO, TAKASHI;OUMURA, YOUICHI;NAKAJIMA, TOSHIROU |
| 分类号 |
G01B11/02;G01D5/30;G01D5/36;(IPC1-7):G01B11/00 |
主分类号 |
G01B11/02 |
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