| 摘要 |
The present invention provides a pellicle and a pellicle film material having an excellent transmittance for ultraviolet with a wavelength of up to 200 nm and being excellent in light resistance (durability) and film strength. The pellicle film of the present invention comprises an organic polymer which, when formed into a film with a thickness of d mu m, exhibits an average light absorptance of A % at wave range of exposure light source, the thickness d and the average light absorptance A satisfying the relationship: A/d ≤ 1.0 (%/ mu m). The pellicle film is one for ultraviolet having a wavelength of 140 to 200 nm. It is preferred that the pellicle film have a thickness of 0.1 to 10 mu m. In the present invention, for example, a silicone polymer whose main chain is composed of siloxane bond (Si-O bond) can be mentioned as a pellicle film material. The silicone polymer preferably has a fluorine (F) containing group as a branch chain group. Further, a fluororesin consisting of carbon (C) and fluorine (F) as constituent elements is preferably used as a pellicle film material. The pellicle of the present invention comprises the above pellicle film. <IMAGE> |
