| 发明名称 |
LOW-COST PHOTOPLASTIC CANTILEVER |
| 摘要 |
<p>A method of manufacturing a cantilever with tip comprising the steps of forming a tip-like indent in a substrate, depositing a photoresist layer which fills said tip-like indent and covers at least a part of said substrate, and photolithographically structuring said photoresist layer to form said cantilever with tip out of said photoresist.</p> |
| 申请公布号 |
EP0990195(A1) |
申请公布日期 |
2000.04.05 |
| 申请号 |
EP19990918200 |
申请日期 |
1999.04.28 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES |
发明人 |
ANDREOLI, CORNEL;BRUGGER, JUERGEN, P.;DRECHSLER, UTE;VETTIGER, PETER |
| 分类号 |
G01B7/34;G03F7/00;G03F7/20;(IPC1-7):G03F7/00 |
主分类号 |
G01B7/34 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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