COATING FLUID FOR FORMING LOW-PERMITTIVITY SILICA-BASED COATING FILM AND SUBSTRATE WITH LOW-PERMITTIVITY COATING FILM

摘要

A coating fluid capable of forming a silica-based coating film having a relative permittivity as low as 3 or below and a low density and excellent in resistance to oxygen plasma and suitability for other processings; and a substrate having a coating film having such properties. The coating fluid is characterized by comprising a polymer composition comprising (i) an alkoxysilane represented by the following general formula (I) and/or a hydrolyzate of at least one halogenated silane represented by the following general formula (II) and (ii) a readily decomposable resin. In the formulas (I): XnSi(OR)4-n and (II) XnSiX'4-n X represents hydrogen, fluorine, C1-8 alkyl, fluoroalkyl, aryl or vinyl; R represents hydrogen, C1-8 alkyl, aryl, or vinyl; X' represents halogeno; and n is an integer of 0 to 3.