Structural body comprising aluminum nitride and method of producing the same

摘要

A structural body has an aluminum nitride sintered body, a silicon carbide film formed on a surface of the sintered body, and an intermediate layer generated between the sintered body and the silicon carbide film. The intermediate layer is mainly made of a silicon nitride. Preferably, the intermediate layer includes smaller than 5 wt% of carbon and smaller than 5 wt% of aluminum, and a thickness of the intermediate layer is greater than 0.2 mu m.