| 摘要 |
A method of producing a piezoelectric/electrostrictive film element is disclosed. The film element includes a zirconia substrate (2,22) having a window (6, 36) which is closed by a diaphragm portion (10, 26), and a piezoelectric or electrostrictive unit (18, 24) formed on the substrate and including a piezoelectric or electrostrictive layer (14, 42) between upper and lower electrodes (16, 44; 12, 40). The method comprises the steps of: (a) preparing the substrate which has been sintered and in which at least the diaphragm portion contains alumina in an amount of 1.1-5.0 parts by weight; (b) forming, by a film-forming process, the lower electrode on the diaphragm portion, and the piezoelectric/ electrostrictive layer on the lower electrode by using a piezoelectric/electrostrictive material which contains magnesia or a component which gives magnesia, in an independent form or in a compound form; and (c) firing the piezoelectric/electrostrictive layer, so as to deposit particles consisting principally of a compound of alumina and magnesia at least on an interface between the diaphragm portion and the lower electrode, the interface being located right under the piezoelectric/electrostrictive layer. <IMAGE> |
