CARRYING METHOD OF LARGE SIZE WAFER

摘要

PURPOSE: A large size wafer carrying method is provided to prevent damage of a large size wafer during a transporting by dividing the large size wafer by two or four. CONSTITUTION: A large size wafer carrying method comprises the steps of equally dividing a large-sized wafer into many parts, containing the divided wafer parts in a wafer carrier fabricated according to a size of the divided wafer part, and carrying the divided wafer parts to a packaging process line. The wafer is divided by a diamond wheel or a scribe and break method.