| 摘要 |
PROBLEM TO BE SOLVED: To detect the defects in a pattern under the state that the influence of the detection errors at the detection of an image is reduced by a method wherein the registering of patterns having the same shape as each other are made possible by an accuracy, which is below a detected pixel size. SOLUTION: A first image signal, which is obtained by photographing a first pattern, is stored in a storing means. A second image is obtained by photographing a second pattern. The second image is stored in the storing means and, at the same time, the first image signal stored in the storing means is taken out so as to register the taken-out first pattern image with the second pattern image by an accuracy, which is below a pixel unit, in order to detect the defects in the patterns on the basis of the amount of shaft between the images of the two patterns registered by the accuracy, which is below the pixel unit.
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