| 摘要 |
PURPOSE:To obtain the process for production of the pellicle in order to obtain the surely and uniformly fixed pellicle by increasing the strength of adhesion between a pellicle frame and an optical thin film. CONSTITUTION:The process for production of the pellicle having the optical thin film 1 provided with an antireflection layer consists of (1) a stage for fixing a film body carrying the optical thin film 1 for the pellicle, (2) a stage for preparing and fixing a mold having a groove corresponding to the desired part of the film body, (3) a stage for bringing the grooved mold and the film body into contact with each other under a reduced pressure while holding the film body fixed, (4) a stage for removing the antireflection layer by introducing a soln. necessary for removing at least the outermost layer of the antireflection layer in the desired part of the film body into the groove, (5) a stage for separating the mold and the film body and (6) a stage for bringing the pellicle frame 2 with an adhesive 3 and the film body into contact with each other via a part 6 where at least a part of the antireflection layer is removed, then curing the adhesive 3. |
