| 摘要 |
PROBLEM TO BE SOLVED: To expose without applying tension on a beltlike work, in a exposure device which conveys the beltlike work in a grip-feeding manner. SOLUTION: A beltlike work Wb is held by a feed grip part 12, conveying the beltlike work Wb to the downstream side of a conveying direction. During conveyance of the work Wb, its menderings are detected and altered. After stopping the conveyance of the beltlike work Wb, it is locked tight by a work locking mechanism 21 installed at the upstream side of an exposing part 3. Subsequently, the feed grip part 12 travels upstream as far as a distance, where the beltlike work Wb extende, in keeping the feed grip part 12 held with the beltlike work Wb, whereby tension applied so far on the work Wb is removed away. Next, the beltlike work Wb is clamped tight by another work locking mechanism 22, and simultaneously the work Wb is locked by suction to a work stage, and then a mask is shifted and its alignment takes place, and thus the beltlike work Wb is exposed.
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