| 摘要 |
An inspection system for detecting surface defects on an object is disclosed, which includes a light source operable to emit a broad spectrum visible light to illuminate the object and a video source operable to receive an image from light reflected from the object surface at a predetermined direction. The system further includes an image processor operable to compare the intensity of the reflected light received by the video source with a range of predetermined intensity values so as to detect defects on the object surface. The inspection system is particularly suited for use in semiconductor manufacturing.
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