| 摘要 |
PROBLEM TO BE SOLVED: To form a pressure chamber or a through hole in a channel plate finely and precisely by blowing abrasive grains of specified means grain size to the surface being machined of a matter to be machined thereby etching the surface being machined and forming a pressure chamber and a through hole in one surface of a planar member. SOLUTION: A channel plate is manufactured by making a nozzle of through hole and a through hole 50C or a recess of ink channel, e.g. a pressure chamber, in one surface 50A of a glass plate 50 by powder beam machining. In powder beam etching, abrasive grains having mean grain size of 24μm or less are blown to the surface to be machined. An ink jet head is manufactured by pasting a diaphragm and a piezoelectric actuator comprising a piezoelectric element, while positioning, on one surface of the channel plate. According to the method, a pressure chamber and an ink channel, e.g. a nozzle, can be formed with high accuracy without causing fluctuation in the width, length or depth.
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