CLEANING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a cleaning method improved in cleaning action with a wide application for forms of stains without causing damages on a surface to be cleaned. SOLUTION: A first step of injecting a small amount of a cleaning liquid via an injection section 4 to a carrier gas flow with a large capacity with a pressure exceeding 1 kgf/cm2 within a passage 2 so as to form a mixed flow of a drop-like cleaning liquid and the carrier gas before spraying the mixed flow to a surface to be cleaned via a nozzle 3 and a second step of increasing the injection amount of the cleaning liquid to the carrier gas flow with the large capacity so as to form a mixed flow of the drop-like cleaning solution and the carrier gas before spraying the mixed flow to the surface to be cleaned via the nozzle 3 are combined. For example, injection volume ratio of the cleaning liquid to the carrier gas in the first step is 0.1/1000 to 3/1000 and the same ratio in the second step is 3/1000 to 20/1000 are employed.