| 摘要 |
PCT No. PCT/JP98/02008 Sec. 371 Date Jan. 8, 1999 Sec. 102(e) Date Jan. 8, 1999 PCT Filed May 6, 1998 PCT Pub. No. WO98/51011 PCT Pub. Date Nov. 12, 1998A boundary wave device and a fabrication method thereof that allow the conversion efficiency of a boundary wave excited by electrodes to be improved and prevents the device from being affected by parasitical resistance between the electrodes are provided. interdigital transducers 3 are formed on a main surface of a piezoelectric first substrate 2. A dielectric film 5 is formed on a main surface of the first substrate 2 so that the dielectric film 5 coats the interdigital transducers 3 and has a smooth surface 4. A Si second substrate 6 is layered on the dielectric film 5.
|
