Method and apparatus for sputtering,申请号GB19650008979-传众专利搜索

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发明名称	Method and apparatus for sputtering
摘要
申请公布号	GB1103653(A)	申请公布日期	1968.02.21
申请号	GB19650008979	申请日期	1965.03.02
申请人	G. T. SCHJELDAHL COMPANY	发明人
分类号	C23C14/28;H01J37/34	主分类号	C23C14/28
代理机构		代理人
主权项
地址

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