发明名称 |
METHOD FOR IMPLEMENTATION OF FAN FILTER UNIT |
摘要 |
PURPOSE: A method for installing a fan filter unit is provided to purify air in a clean room by using a fan filter unit formed with one body. CONSTITUTION: A plurality of long bar(13) of inverted T shape is installed on an upper portion of a clean room according to a predetermined interval. An interval maintenance bar is installed between the long bars(13) to maintain the interval between the long bars(13). A plurality of short bar(14) is installed between the long bars(13) in order to install fan filer units(10) between the long bars(13). The plurality of fan filter unit(10) is installed continuously by moving the fan filter unit(10) along an upper portion of the long bar(13).
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申请公布号 |
KR100250932(B1) |
申请公布日期 |
2000.04.01 |
申请号 |
KR19970034023 |
申请日期 |
1997.07.21 |
申请人 |
ACE LAB, INC. |
发明人 |
KIM, KWANG YOUNG;CHOI, BONG AM;LEE, JUNG YONG |
分类号 |
H01L21/02;(IPC1-7):H01L21/02 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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