| 摘要 |
PURPOSE: A method for performing realtime monitoring for an etching process of a distributed Bragg reflector is provided to report information about an etching speed and an etching stop step by monitoring a wet-etching process when performing the wet-etching process. CONSTITUTION: A laser beam is irradiated to a sample(12) soaked in an etching solution. In the process for irradiating the laser beam, the laser beam is irradiated uniformly to a whole surface of the sample(12) by using a convex lens(14A,14B). The laser beam reflected from the sample(12) is inputted to a detector(13) by using the convex lens(14A,14B). A computer(17) connected with the detector(13) analyzes a periodical signal of the incident laser beam and senses an etching speed through the analysis for the signal.
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