| 摘要 |
PROBLEM TO BE SOLVED: To lead a discharge space into a desirable atmosphere by connecting a ventilation tube and an exhaust pump through a vacuum head provided with an O-ring abutting on a surface of the ventilation tube and a circulation passage for obtaining the water pressure for pushing the O-ring to the ventilation tube side, and eliminating the impure material inside of the discharge space between a pair of boards. SOLUTION: Cooling water is supplied and drained into/from a cooling water circulation passage 6 through a water supply tube 6a and a drain tube 6b, and the water pressure inside of the cooling water circulation passage 6 and a hydraulic pump 7 can be adjusted by adjusting the supplied water and the drained water. In order to tightly adhere an O-ring 5 to a ventilation tube 10 with the strong pressure, supplied water from the water supply tube is increased and the drained water from the drain tube 6b is decreased during a constant time so as to strengthen the water pressure inside of the hydraulic pump 7. At this stage, the water pressure of the O-ring is adjusted so that the ventilation tube 10 is not broken by the water pressure. A vacuum head 1 and the ventilation tube 10 are formed into the airtight condition by utilizing the water pressure so as to release the air and fill the discharge gas from/in the discharge space, and the secure and stabilized airtight condition is thereby obtained.
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