| 摘要 |
PROBLEM TO BE SOLVED: To enhance inspection performance of a visual inspection system for electronic device by acquiring the image at the lead part and the mold part of a small IC, e.g. a small mold IC, with high contrast. SOLUTION: The visual inspection system employs two irradiation lights of different wavelength and colored inspection tables wherein one irradiation light (green) exhibits low reflectance for the color (red) of the inspection table 20a and acquires the image at a lead part 11 mounted on the inspection table with high contrast by means of a sufficiently intensive reflected light therefrom. The other irradiation light (red) exhibits high reflectance because of same wavelength as the color (red) of the inspection table 20a and the image at a mold part 12 is acquired with high contrast. A good image of surface defect, or the like, can be acquired by modifying the irradiation angle and illuminance thus enhancing inspection performance of the visual inspection system for electronic device.
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