发明名称 HEATING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a heating device improved in flatness of a hot plate. SOLUTION: This heating device is provided with a hot plate 1 disposed with a heater 6, a base 4 having a reference surface, fixing legs 2c for fixing the hot plate 1 to the reference surface of the base 4, support legs 2a, 2b for immovably supporting the hot plate 1 in parallel with the reference surface of the base 4 in a direction vertical to the reference surface of the base 4, and auxiliary legs 7 arranged between the fixing legs 2c and the support legs 2a, 2b or between the support leg 2a and the support leg 2b so as to correct the warp of the hot plate 1.
申请公布号 JP2000091062(A) 申请公布日期 2000.03.31
申请号 JP19980260485 申请日期 1998.09.14
申请人 CANON INC 发明人 KAMATA SHIGETO;EMOTO KEIJI
分类号 C03B29/00;C03B29/02;C03B32/00;H05B3/68;(IPC1-7):H05B3/68 主分类号 C03B29/00
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