| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a coating apparatus easy to change the thickness of a coating film. SOLUTION: A rotation displacement motor 71 for displacing the whole frame 1 rotatively around a rotating axle 1a is provided on a lower side of the frame 1. When the motor 71 is operated, the whole frame 1 is made slanted and a substrate 2 and a nozzle 10 are rotatively displaced in the same direction. At the same time, a nozzle posture motor is provided. The nozzle posture motor is operated to displace the nozzle 10 rotatively. Then, the posture of the nozzle 10 to the substrate 2 can be changed by setting the nozzle 10 at a desired angle. While the posture of the nozzle 10 under control is held and the nozzle 10 is put near to the substrate 2, the nozzle 10 is moved relatively along a coating face of the substrate 2 to carry out a coating step.</p> |
