| 摘要 |
PROBLEM TO BE SOLVED: To obtain a manufacturing method for an optical branching circuit by a simple process. SOLUTION: A lower clad layer 2 consisting of polyfluoroalkylmethacrylate and a core layer 3 consisting of polymethylmethacrylate are successively laminated on a substrate 1 consisting of quartz glass. Next, an etching by photolithography is carried out, thereby forming an optical waveguide 30 and cut surfaces 41, 42, 43 approximately perpendicular to the surface 11 of the substrate, from the surface 31 of the optical waveguide 30 on the side opposite to the substrate 1. Thereafter, by performing the heat treatment at a temp. of >= the glass- transition point of polymethylmethacrylate forming the optical waveguide 30, the cut surface 43 is inclined, thereby forming the optical waveguide mirror. At this time, the inclined angle of the light guide mirror is controlled by adjusting the distance between respective cut surfaces or the heat treatment temp. |
