ABSOLUTE PRESSURE-TYPE SEMICONDUCTOR PRESSURE SENSOR

摘要

PROBLEM TO BE SOLVED: To provide an absolute pressure-type semiconductor pressure sensor in which a limit in terms of a design is relaxed and in which an introduction hole into which a pressure to be measured is introduced can be formed in a desired position irrespective of the mounting position of a semiconductor strain gage. SOLUTION: A recessed part is formed in a chip mounting part 5a to which a pressure sensitive chip 1 is attached. A pressure-to-be-measured introduction hole 6 which is passed through the chip mounting part 5a and into which a pressure to be measured is introduced is bored and formed in its central part. In addition, four island-shaped pedestals 9 are arranged at equal intervals around the pressure-to-be-measured introduction hole 6 by using the introduction hole 6 at the recessed part as the center. Then, a glass plate 3 is pasted on the pedestals 9. The pressure sensitive chip 1 is attached to the chip mounting part 5a. Electrodes of a pressure sensitive gage are connected to a plurality of leads 7 via bonding wires 8. The plurality of leads 7 are insulated electrically from each other. A lid part 5b which is used to seal the airtightness of the inside is connected to the chip mounting part 5a. The chip mounting part 5a and the lid part 5b constitute an enclosure 5.