摘要 |
PROBLEM TO BE SOLVED: To store beforehand aligning conditions in response to patterns forming conditions in an aligning device, and simply and promptly set the aligning conditions at the time of alignment. SOLUTION: Optimal aligning conditions in response to various patterns forming conditions are beforehand acquired by experiments, and are stored in a memory device 16 provided in the aligning device. If the patterns forming conditions of a reticle are inputted to the aligning device at the time of actual alignment, a staple control system acquires optimal aligning conditions based on the stored data, and sets as set conditions of the aligning device. Accordingly, it is possible to simply and promptly set the optimal aligning conditions in response to the patterns forming conditions.
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