| 摘要 |
<p>PROBLEM TO BE SOLVED: To form a micro and accurate film thickness by providing a constitution in which the first plate body is placed on the second plate body, forming the first plate body with a transparent center out of material to transmit infrared rays, forming a circular recessed part between the center part and outside of the upper surface in the second plate body, and raising the outside upper surface higher than the upper surface of the center part by a predetermined thickness. SOLUTION: When a liquid with OH groups is supposed as a liquid to be used, the first plate body 2 is made of anhydrous quartz glass and circular, and its lower surface 11 and upper surface 12 are formed into parallel flat surfaces. The second plate body 3 is, for example, made of quartz glass, its upper surfaces 4 and 5 and lower surface 16 except a recessed part 6 are in parallel with one another, and the upper surfaces 4 and 5 are formed into flat surfaces at the same height. In addition, a reflecting film 7 is uniformly formed of reflective material such as aluminum on the upper surfaces 4 and 5 by coating, vapor deposition, etc., and a protective film 8 and a liquid thickness setting film 9 are formed on the reflecting film 7. Then a liquid is dripped onto the upper surface 14 of the center part inside the recessed part 6 of the plate body 3, and the lower surface 11 of the plate body 2 is placed on the outside upper surface 13 of the plate body 3 to form a liquid film of the same thickness as that of the liquid thickness setting film 9.</p> |
