| 摘要 |
PROBLEM TO BE SOLVED: To permit the shortening of measurement time without changing scanning speed by providing a plurality of cantilevers with probes at their tips, independently detecting the deflection of the plurality of cantilevers, independently directing the plurality of cantilevers toward a sample, and vertically moving them. SOLUTION: A probe 1 and the deflection detecting means 5 of a cantilever 2 are in a one-to-one constitution, and it is possible to detect the displacement of a plurality of probes 1 independently. On the basis of the output of a deflection detecting means 5, a computer and a controller 6 vertically move a support 3 by a piezoelectric actuator 4 so as to maintain the constant deflection of the cantilever 2 to scan the surface of a sample. By this, it is entirely satisfactory for one probe 1 to scan a small area.
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