| 摘要 |
PROBLEM TO BE SOLVED: To obtain a large high quality diffraction grating. SOLUTION: The large high quality diffraction grating, which has a carefully formed blaze angle and a defect-free reflection surface, is manufactured on a specially oriented substrate by the use of photolithography and micro machining techniques. Diffraction grating grooves 110 having the reflection surface corresponding to a specific crystal plane is formed by the anisotropic etching of a substrate by selecting a single crystal substrate with a known angle to the crystal plane, on the surface of which the substrate exists. The blaze angle of the diffraction grating is determined by an angle between the surface of the substrate and the specific crystal plane. Consequently, the large type high quality diffraction grating, which is, for example, to be used for a laser device or to be used as a master grating in the manufacture of a replica grating, is manufactured.
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