| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for accurately positioning a phase difference imparting member used for a phase microscope in a horizontal direction orthogonal to an optical axis. SOLUTION: As for the method for positioning the phase difference imparting member 23 used for the phase microscope in the horizontal direction orthogonal to the optical axis AX, the method is provided with a process of picking up the image of a pattern WM arranged on the object surface of the phase microscope by image pickup means 26X and 26Y and a process of measuring the shift quantity of the image in the horizontal direction in a state where the defocus quantity of the image picked up by the image pick up means is varied, and the phase difference imparting member 23 is positioned in the horizontal direction based on the relation between the defocus quantity of the image and the shift quantity of the image.
|
