发明名称 FREEZE VACUUM DRYING APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a freeze vacuum drying apparatus which can maintain the inside of a vacuum drying chamber in a sterilized state for a long period and which is excellent in operation efficiency and can be manufactured inexpensively. SOLUTION: In an apparatus wherein the inside of a vacuum drying chamber 1 holding a material 8 to be dried is vacuum-pumped by an evacuation device 3 connected to the chamber so as to subject this material 8 to freeze vacuum drying, the surface of the vacuum drying chamber exposed inside the chamber is covered with a thin film 14 of a titanium oxide and light sources 15 which irradiate the thin film 14 and make it act for sterilization by photolysis are provided. For these light sources 15, light sources casting ultraviolet light of a wavelength 400 nm or below are provided and the light sources 15 or reflectors are provided in a plurality so that many dark parts may not be brought about in the vacuum drying chamber 1.
申请公布号 JP2000088461(A) 申请公布日期 2000.03.31
申请号 JP19980265085 申请日期 1998.09.18
申请人 ULVAC JAPAN LTD 发明人 FUJISHIMA AKIRA;NAKAMURA KYUZO;NEGISHI TOSHIO;MOMONO TAKESHI
分类号 B01J3/00;F26B5/06;F26B25/12;(IPC1-7):F26B25/12 主分类号 B01J3/00
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